XH-1400SH 半导体硅晶圆片湿法清洗线

XH-1400SH semiconductor silicon wafer wet cleaning line

产品特点：

1、用于半导体RCA和SiC晶圆片的清洗和腐蚀。

2、人工手动可视推拉窗。

3、采用高频超声波清洗，提高硅片表面洁净度。

4、采用石英、PVDF及PP等材质的槽体，满足不同的清洗药液。

5、采用非接触是加热，确保品质的和安全。

6、配有药液恒温循环系统。

Features:

1、Used for cleaning and corrosion of semiconductor RCA and SiC wafer.

2、With manual visual push-pull window.

3、Clean by use of high frequency ultrasonic to improve the

cleanliness of the surface of the silicon chip.

4、Use the slots of the materials such as quartz,PVDF and PP and so on to meet the requirements of different cleaning liquids.

5、Non-contact heating is adopted to ensure quality and safety.

6、It is equipped with a medicine liquid thermostatic circulation system.